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Metals & Alloys

Sputtering Targets & Evaporation Materials

Metal, oxide and alloy sputtering targets plus evaporation pellets and pieces in standard and custom sizes for thin-film deposition.
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Thin-film coatings for electronics, optics and solar cells start with a sputtering target or an evaporation source. This sub-category supplies both, in metals, oxides and alloys. Aluminium sputtering targets are listed at 99.9% to 99.99% in diameters of 25.4 mm, 3 inch and rectangular 200 x 125 x 3 mm, alongside Aluminium oxide sputtering targets of 4 inch x 6 mm, Aluminium pellets of 3 x 3 mm at 99.999% and Aluminium oxide pieces at 99.99%.

Target buyers specify material, purity, diameter, thickness and whether the target should be bonded to a copper backing plate. Density matters for ceramic targets, since low density causes arcing and particles. Evaporation users choose pellet size and purity to suit their crucible and process. Fitting the target to your cathode size is the first check.

  • Metal targets for conductive and reflective films
  • Oxide targets for dielectric and optical layers
  • Pellets and pieces for e-beam and thermal evaporation

Targets ship vacuum-sealed in clean packaging, cushioned to protect edges. Each comes with a COA. Custom sizes and bonding are quoted on request.

Sputtering Targets & Evaporation Materials: questions buyers ask

Should my sputtering target be bonded?
Bonding a target to a copper backing plate improves heat removal and supports brittle or thin targets, allowing higher sputtering power without cracking. Ceramic and oxide targets are usually bonded. Thick metal targets may be used unbonded if your cathode is designed for it. Check your system manufacturer's guidance.
Why does target density matter for oxide targets?
Low-density ceramic targets contain pores that trap gas and cause arcing during sputtering. Arcing ejects particles that create defects in the film and can crack the target. High-density targets, often above 95% of theoretical, run more stably and give cleaner, more uniform coatings.
How should sputtering targets be stored?
Keep targets in their sealed vacuum bags until installation, in a clean, dry area. Handle them with clean gloves to avoid contamination. Once opened, store unused targets in a desiccator or nitrogen cabinet. Some oxide and reactive metal targets absorb moisture or oxidise if left exposed.

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